An innovative multi-purpose measurement system, theSmartScope® Flash™ 670 offers unique capabilities - with a large XYZ measuring range and a granite bridge that offers excellent metrological stability across the entire X-axis.
The instrument head on theSmartScope® Flash™ 670 moves in the X-axis across a granite bridge, while the bridge moves in parallel tracks in the Y-axis (this ensures high accuracy and repeatability).
XYZ Stage Travels: 650 x 670 x 200 mm , 650 x 670 x 300 mm, 650 x 670 x 400 mm
Area Accuracy: (2.0 + 5L/1000) µm
Volumetric Accuracy: (3.5 + 8L/1000) µm
Z Accuracy: (3.0 + 8L/1000) µm